Photolithography, also termed
optical lithography or
UV lithography, is a process used in
microfabrication to pattern parts of a thin film or the bulk of a
substrate. It uses light to transfer a
geometric pattern from a
photomask to a
light-sensitive chemical "
photoresist", or simply "resist," on the substrate. A series of
chemical treatments then either engraves the exposure pattern into, or enables deposition of a new material in the desired pattern upon the material underneath the photo resist. For example, in complex
integrated circuits, a modern
CMOS wafer will go through the photolithographic cycle up to 50 times.